課程名稱 |
奈米光機電系統 Optical Nano-electro-mechanical System |
開課學期 |
100-1 |
授課對象 |
電機資訊學院 生醫電子與資訊學研究所 |
授課教師 |
蔡睿哲 |
課號 |
OE5027 |
課程識別碼 |
941 U0360 |
班次 |
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學分 |
3 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期三2,3,4(9:10~12:10) |
上課地點 |
電二104 |
備註 |
總人數上限:30人 |
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1001moems |
課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
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課程概述 |
The major topics include:
1) Introduction: development from MEMS to NEMS
2) Fabrication technologies of micro devices and nano-etch technology
3) Governing physics in micro/nano world, actuation mechanisms, and mechanical structures
4) Short introduction to optics in free space and waveguides
5) Optical MEMS/NEMS devices and case studies
6) Project presentations and/or reports by students |
課程目標 |
This course will focus on micro/nano devices and their applications. The material will cover the principles, designs, and fabrication processes behind this emerging technology. |
課程要求 |
成績評量方式:
Midterm 30%
Final 40%
Project 30% |
預期每週課後學習時數 |
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Office Hours |
另約時間 |
指定閱讀 |
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參考書目 |
- Marc J. Madou, "Fundamentals of Microfabrication: The Science of
Miniaturization," Second Edition, CRC Press (ISBN: 0-8493-0826-7), 2002.
- Steve Senturia, "Microsystem Design," Kluwer Academic Publishers, 2001
- Gregory T. A. Kovacs, "Micromachined Transducers - Sourcebook," WCB
McGraw-Hill, 1998.
- Reading Assignment |
評量方式 (僅供參考) |
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